deep-ultraviolet lithography
- deep-ultraviolet lithography
- tolimojo ultravioleto litografija
statusas T sritis radioelektronika
atitikmenys: angl. deep-ultraviolet lithography
vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f
rus. литография с источником дальнего ультрафиолетового излучения, f
pranc. lithographie à ultraviolet lointain, f
Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“.
Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas.
2000.
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tolimojo ultravioleto litografija — statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения, f pranc. lithographie à… … Radioelektronikos terminų žodynas
литография с источником дальнего ультрафиолетового излучения — tolimojo ultravioleto litografija statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения,… … Radioelektronikos terminų žodynas
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