deep-ultraviolet lithography

deep-ultraviolet lithography
tolimojo ultravioleto litografija statusas T sritis radioelektronika atitikmenys: angl. deep-ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения, f pranc. lithographie à ultraviolet lointain, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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  • Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… …   Wikipedia

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  • lithographie à ultraviolet lointain — tolimojo ultravioleto litografija statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения,… …   Radioelektronikos terminų žodynas

  • Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as …   Wikipedia

  • X-ray lithography — is a next generation lithography that has been developed for the semiconductor industryref|vlad. Batches of microprocessors have already been produced. The short wavelengths of 0.8 nm X rays overcome diffraction limits in the resolution of… …   Wikipedia

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  • Lithografie mit extrem kurzwelligem Ultraviolettlicht — tolimojo ultravioleto litografija statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения,… …   Radioelektronikos terminų žodynas

  • tolimojo ultravioleto litografija — statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения, f pranc. lithographie à… …   Radioelektronikos terminų žodynas

  • литография с источником дальнего ультрафиолетового излучения — tolimojo ultravioleto litografija statusas T sritis radioelektronika atitikmenys: angl. deep ultraviolet lithography vok. Lithografie mit extrem kurzwelligem Ultraviolettlicht, f rus. литография с источником дальнего ультрафиолетового излучения,… …   Radioelektronikos terminų žodynas

  • Figuring — is the process of final polishing of an optical surface to achieve the shape required for a given application. The standard example in amateur telescope making is the process of converting the smooth spherical mirror produced by earlier stages… …   Wikipedia

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